Thermo Scientific™ Helios 5 Hydra UX DualBeam by Thermo Fisher Scientific

It combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific Elstar SEM Column to provide the most advanced focused ion- and electron-beam performance.

Key Benefits

• Largest application space with unique ion source delivering four fast, switchable ion species: Xe, Ar, O, N
• Highest quality Ga+ free TEM and APT sample preparation with Xe, O or Ar thanks to the new PFIB column enabling 500 V final polishing and delivering superior performance at all operating conditions
• Fastest and easiest, automated, multisite in situ and ex situ TEM sample preparation and cross-sectioning using optional AutoTEM 5 Software
• Highest throughput and quality statistically relevant 3D characterization, cross-sectioning and micromachining using next-generation 2.5 μA Plasma FIB column
• Access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software
• Shortest time to nanoscale information for users with any experience level with SmartAlign and FLASH technologies
• Reveal the finest details using the best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies
• The most complete sample information with sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors
• Most advanced capabilities for electron and ion beaminduced deposition and etching on DualBeam systems with optional MultiChem or GIS Gas Delivery Systems
• Precise sample navigation tailored to individual application needs thanks to the high stability and accuracy of the 150 mm Piezo stage and optional in-chamber Nav-Cam Camera
• Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI Modes