Park NX-Hybrid WLI by Park Systems

Manufacturer Park Systems  |  Available Worldwide
Atomic force microscope with built-in white light interferometry profilometry for semiconductor and related manufacturing quality assurance, process control for semiconductor front-end, back-end up to advanced packaging, and R&D metrology. It is for those that require high throughput measurements over a large area that can zoom down to nanometer-scale regions with sub-nano resolution and ultra-high accuracy.

Park NX-Hybrid WLI by Park Systems product image
Park NX-Hybrid WLI
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  • White light interferometry is an optical technique that can image a very wide area, very fast, producing high throughput measurements.
  • Atomic force microscopy is a scanning probe technique that delivers the highest nanoscale resolution measurements even for transparent materials.