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FLEXSEM II

Compact SEM with low vacuum function

Hitachi High-Tech Europe

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FlexSEM II is a table-top / compact SEM for imaging tasks that go beyond the performance of conventional table-top SEMs. It’s the ideal system for anyone who doesn’t want to invest in a classic SEM, but also doesn’t want to compromise on imaging performance and detector variability.

Product features:

  • 4nm @ 20kV High-resolution electron optics with beam energies between 300eV and 20keV
  • High and adjustable low vacuum up to 100Pa
  • SE and 4+1 segment backscatter detector standard, low vacuum SE optional (UVD); can also be used for cathodoluminescence and STEM imaging, optical colour navigation camera and chamberscope
  • 5-axis sample stage for samples up to max. 153mm diameter and 40mm height

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