FLEXSEM II
Compact SEM with low vacuum function

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FlexSEM II is a table-top / compact SEM for imaging tasks that go beyond the performance of conventional table-top SEMs. It’s the ideal system for anyone who doesn’t want to invest in a classic SEM, but also doesn’t want to compromise on imaging performance and detector variability.
Product features:
- 4nm @ 20kV High-resolution electron optics with beam energies between 300eV and 20keV
- High and adjustable low vacuum up to 100Pa
- SE and 4+1 segment backscatter detector standard, low vacuum SE optional (UVD); can also be used for cathodoluminescence and STEM imaging, optical colour navigation camera and chamberscope
- 5-axis sample stage for samples up to max. 153mm diameter and 40mm height
Brochures
FlexSEM: The smart little SEM that flexibly adjusts to your skills and needs
In this article, Hitachi High-Technologies introduce the Hitachi FlexSEM, an extremely powerful little SEM with a novel compact layout. It combines a high and easily obtainable performance close to that of a classical full-scale SEM with an ultra compact (just 45cm wide) tabletop-SEM-like body, includes user-customizable software, is fully user-maintainable, and comes with an attractive price tag.
Hitachi Product Catalogue 2024/25- German
In this brochure, Hitachi High-Technologies present a wide range of electron microscopes and ion beam systems available, organised by product class, in German. Each tool is designed to reliably meet your application needs.
Hitachi Product Catalogue 2024/25- English
In this brochure, Hitachi High-Technologies present a wide range of electron microscopes and ion beam systems available, organised by product class. Each tool is designed to reliably meet your application needs.
The FlexSEM II: High-Resolution SEM Imaging in a surprisingly compact design
In this application note, Hitachi High-Tech Europe demonstrates the Hitachi FlexSEM II, which addresses the need for more compact yet powerful scanning electron microscopes (SEMs), by bridging the gap between tabletop convenience and full-scale performance.





