2830 ZT WDXRF Wafer Analyzer by Malvern Panalytical

Manufacturer Malvern Panalytical  |  Available Worldwide
Advanced semiconductor thin film metrology solution


2830 ZT WDXRF Wafer Analyzer by Malvern Panalytical product image
2830 ZT WDXRF Wafer Analyzer
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The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition.

Designed specifically for the semiconductor and data storage industry, Malvern Panalytical’s 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.

 

Features:

  • Continuous capability and speed - The 4 kW SST-mAX X-ray tube features groundbreaking ZETA technology which eliminates the effects of X-ray tube aging.
  • Maximized uptime - Instrumentation using such X-ray tubes requires regular drift correction to compensate for decreasing intensity, especially for light elements.
    Implementation of the SST-mAX Tube in the 2830 ZT solves this drift problem, thereby maximizing uptime and maintaining instrument precision over time.
  • Easy to use - The 2830 ZT is supplied with PANalytical’s advanced SuperQ software, which includes FP Multi, the software package specifically designed for multi-layer analysis.
  • FALMO-2G - The FALMO-2G easily integrates into any lab or fab: from simple manual carrier loading to full automation.