SU3800/SU3900 Family

The SU3800/3900 VP-SEM family focuses on productivity. These tools automate repetitive tasks, so you can achieve reproducible results in a short time with little manual effort.

Two different sample chambers with either tungsten or Schottky field emission optics are available. Both SU3800 and SU3900 feature common software, electronics, and detector platform.

Product features:

• Highly efficient Hitachi detectors
  • Secondary electron detector for high vacuum
  • 5-segment semiconductor backscattered electron detector for high and low vacuum, selection of different signal modes such as material contrast, surface topography, 3D
  • Optional multifunction detector “UVD”: Secondary electrons in a low vacuum, cathode luminescence signal, transmission (STEM, in conjunction with special sample holder)
• Field-free, modern electron optics optionally with Schottky field emitter or with robust, inexpensive and, thanks to intelligent control, long lasting tungsten hairpin cathodes
• Easy handling even of non electrically conductive samples with the integrated effective low-vacuum operating mode, which can be switched to at the click of a mouse if required
• For the perfect overview: Colour navigation images of the sample plates cover the entire sample area observable by SEM
• Carefree operation - collisions between the stage and SEM components are virtually eliminated by automatically applied, dynamic range travel limitation