JSM-7610FPlus by JEOL USA

Manufacturer JEOL USA
Thermal, Analytical Field Emission SEM

JSM-7610FPlus by JEOL USA product image
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The JEOL JSM-7610FPlus Field Emission SEM combines two proven technologies – a semi-in-lens detector with integrated electron energy filter (r-filter) and an in-the-lens Schottky field emission gun – to deliver ultrahigh spatial resolution with a wide range of probe currents for all applications (1pA to more than 200 nA). The JSM-7610FPlus offers true 1,000,000X magnification with 0.8nm resolution at 15kV (1.0nm at 1kV) and unmatched beam stability, making it possible to observe the fine surface morphology of nanostructures.
Ultrahigh spatial resolution.

  • In-Lens Thermal Field Emission Gun
  • Aperture angle control lens (ACL) to automatically optimize the spot size at both high and low currents for both analysis and imaging
  • High probe current up to 200 nA (at 15 kV) for various analytical techniques (WDS, EDS, EBSD, CL, etc.)
  • Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images
  • Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression
  • A standard LABE detector for detecting very low energy and very low angle backscattered electrons
  • Eco design for energy conservation
  • Large specimen chamber (200mm diameter sample)