SU9000 II

The SU9000 II is a combination of surface-imaging SEM and intrinsic structure-resolving scanning transmission microscope (STEM) optimised for extreme resolution. This is made possible by the unique electron optics of the SU9000 II, which combines a cold field emitter with almost monochromatic emission with an “inlens” objective lens. The sample is placed on a highly stable “side-entry” holder virtually inside the two-stage objective lens. Similar to the SU8600, a two-stage, energy-filtered detector system, expandable with a mobile backscatter detector, is available for SEM imaging. In transmission mode, TE signal can be detected simultaneously with SEM imaging selectively according to scattering angles (bright field, variable dark field) with a grating resolution of less than 3 Å. A large, windowless EDX detector with a solid angle of up to 0.7 sr can be mounted close to the sample for high-resolution elemental analysis in both SEM and STEM mode.

Product features:

• SEM-STEM combination with ExB-filtered SEM signal and scattering angle-dependent transmission signal detection
• Cold field emitter combined with inlens electron optics guarantee 0.4nm SE resolution and 0.34nm TE resolution at 30k acceleration voltage
• Excellent light element analysis, due to optimal support of a windowless EDX detector by the magnetic immersion lens. Or the use of an energy loss spectrometer