ArBlade 5000 II/IM5000 II-CTC
High-performance Ar+ ion polisher
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"ArBlade 5000 / IM5000 extends the cross-sectioning capabilities of the IM4000 II series with the option of expanding cross-sections to a width of up to 10 mm, depending on actual requirements. For this purpose, the sample is periodically moved laterally during cross-cutting in the previously registered processing area while remaining in the optimum focus. Sequential processing of several individual positions is also possible as an option; the optional multiple sample holder allows automatic processing of up to 3 samples.
The ArBlade 5000 / IM5000 is equipped with a more powerful ion gun with a removal rate of over 1mm per hour. With the ArBlade 5000-CTC, cryo cross-sections of variable widths are also possible at definable process temperatures down to -100 °C.
Product features:
- Single, robust and maintenance friendly Penningtype ion gun with independent control of beam current and acceleration voltage. Allows intensive ion beams at all acceleration voltages (0-8kV)
- Cross-section widths can be flexibly selected by periodically moving the sample relative to the ion beamfrom 1 mm to 10 mm wide
- Cross-sectional process depth in Si with 100µm protrusion above mask, stage oscillation +/-30°, is 1000µm per hour or more
- Surface polishing can be carried out at tilt angles from 0° to 90°, angle can be changed during the process"
