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Ellipsometric Characterization of Doped and Undoped Crystalline Diamond Structures

4 Mar 2013

Diamond is an attractive material for various fields of technology. In addition to reviewing some of the potential applications of diamond, this note, demonstrates how spectroscopic ellipsometry can be used to characterize the optical and structural properties of doped and undoped diamond layers.

UVISEL Plus Spectroscopic Ellipsometer

HORIBA Scientific

The Reference Ellipsometer for Thin Film Measurements The UVISEL Plus ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. The new UVISEL Plus includes the newest acquisition technology designed to measure faster and more accurately than ever. FastAcq, the newest acquisition technology, is based on double modulation, designed for real world thin film characterization.

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Ellipsometric Characterization of Doped and Undoped Crystalline Diamond Structures