Characterization of Silicon Nanoparticles Embedded in a Silicon-Nitride Matrix by Spectroscopic Ellipsometry

Silicon nanoparticles (Si-nps) show different optical properties than bulk silicon. A strong correlation has been established between the particle size and the band-gap for example. These particular properties offer potentialities of application in optoelectronics, silicon based memories and third generation solar cells. In this application note, nanoparticles embedded in a dielectric matrix were used to enhance the photovoltaic effect. It demonstrates the successful application of spectroscopic ellipsometry to the characterization of SRN thin layers.