Analyzing a NAND Flash memory device using low kV EDS

In this application note, Oxford Instruments NanoAnalysis demonstrates that increasing detector sensitivity, either by sensor size, sensor-sample distance, or window removal, it is possible to collect X-ray counts at high resolution imaging condition and achieve elemental maps with sub 20nm spatial resolution even on the lightest of elements. This, combined with the data processing of Aztec TruMap, allows the accurate mapping of elemental distributions in complex specimens with nano-structures such as a NAND flash memory device.