JAMP-9510F by JEOL USA

Manufacturer JEOL USA
Field Emission Auger Microprobe


JAMP-9510F by JEOL USA product image
JAMP-9510F
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The JAMP-9510F offers the highest spatial resolution available in an Auger microprobe: (min. probe diameter of 3nm SEI; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented "in-lens' Schottky field emission gun, the JAMP-9510F obtains very small spot sizes with beam currents up to 200nA.

  • 3nm SEI resolution
  • 8nm probe diameter for Auger analysis
  • Variable energy resolution from 0.05% to 0.6%
  • Chemical state analysis in several 10nm areas
  • Neutralizing gun allows Auger analysis of insulating materials
  • Large specimen stage - samples up to 95mm in diameter