DektakXT
The DektakXT stylus profilometer features a revolutionary benchtop design that enables an unmatched repeatability of 4 Å and up to 40% improvement in scanning speeds. The technological breakthroughs incorporated in DektakXT enable critical nanometer-level surface measurements for the microelectronics, semiconductor, solar, high-brightness LED, medical, and materials science industries.
DektakXT stylus profilometer
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DektakXT benchtop profilometer is the gold standard in stylus profiling.
With over ten thousand installations worldwide, the Dektak brand is well known for quality, reliability, and value-driven performance. When accurate, trustworthy measurements of step height and surface roughness are needed, people turn to Dektak.
Unmatched performance
- 4Å repeatability delivers industry-leading accuracy
- Single-arch design provides breakthrough scan stability
- Leading-edge “smart electronics” establish low- noise benchmark
- Innovative hardware configuration offers 40% faster data collection times than prior generations
- 64-bit, parallel-processing Vision64® software architecture delivers up to 10 times faster data analyses
Unprecedented efficiency and ease of use
- Intuitive Vision64 user interface workflow simplifies operation
- Self-aligning styli enables effortless tip exchange
Incomparable value from the world leader in stylus profilers
- Bruker delivers premier performance in an affordable package
- Single-sensor design offers low force and extended range in a single platform
DektakXT Stylus Profiler
In this application note, Bruker Nano provides a detailed overview of the DektakXT® Stylus Profiler. Offering high-quality performance, ease of use, and value, the DektakXT is designed to facilitate better process monitoring from R&D to QC. Dektak® innovation enables critical nanometer-level surface measurements for the microelectronics, semiconductors, solar, high-brightness LED, medical, and materials science industries.
ISO-standardized filtering for DektakXT Stylus Profilers
The measurement of various parameters of interest for a surface, including roughness, step heights or depths, by any metrology method necessarily provides only a representation of the surface details. The power of proper filtering for data analysis, according to recognized ISO standard methods cannot be underestimated when striving to provide the most accurate and reproducible results for a measuring system. Bruker has designed ISO compatibility to the two-dimensional (2D) profile ISO 4287 and 4288 standards into the versatile Vision64™ software that powers the DektakXT® StylusProfiler. In this application note, Bruker Nano provides information about the setup and application of these standardized filtering methods as well as the implementation within Vision64 software for a specific applications example of scanning an Si wafer for surface roughness.
