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Nova Metrion exceeds itself in secondary ion mass spectrometry

Nova technology meets the requirements for performing secondary ion mass spectrometry (SIMS) for a leading memory manufacturer

21 Jan 2025

Product news

Nova has announced that "one of the world's leading" memory manufacturers has recently selected the Nova Metrion® platform for its most advanced DRAM R&D as well as DRAM and NAND high-volume manufacturing lines. Nova expects to receive additional orders from this customer as the manufacturer expands its inline metrology capabilities.

Nova Metrion provides tighter process control and improves yield by allowing inline SIMS measurements of materials composition depth profiles in next-generation devices. The platform selection was based on its ability to perform full-wafer measurements of epitaxial layers, with high sensitivity and precision.

Nova Metrion breakthrough technology enables advanced process control of complex and critical multilayer films. It is designed from the ground up for a high-volume manufacturing environment and provides quantitative and actionable results with high-depth resolution and precision.

The Metrion introduces a unique in-line composition profiling capability for key process control measurements, including dopant concentration, contamination, residues, and diffusion, which cannot be obtained by other measurement techniques.

"Bridging the chasm between lab and fab environments is becoming a critical factor in enabling next-generation device manufacturing," said Gaby Waisman, President and Chief Executive Officer of Nova. "Our ability to provide customers with unique solutions like the Nova Metrion, addresses the increasing need for materials process control in advanced memory and logic devices."

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Mass SpectrometryMass spectrometry (MS) is a powerful analytical technique used to identify and quantify molecules based on the mass-to-charge ratio of gas-phase ions. It provides detailed information about the structure, composition, and properties of compounds and is widely used across fields such as environmental monitoring, materials science, drug discovery and development, food and beverage testing, and wider chemical research. Key MS techniques include tandem mass spectrometry (MS/MS), liquid chromatography–mass spectrometry (LS-MS) and inductively coupled plasma (ICP-MS). Choosing from these wide range of techniques and technologies can be a daunting task, so keep up to date with scientific applications, performance expectations, and customer reviews here all in one place. Visit our product directory to receive quotes direct from the manufacturer. NeurobiologyNeurobiology studies the biology of the nervous system, including the structure and function of neurons, glial cells, and their interactions. It is a key field in understanding neurological disorders such as Alzheimer�s, Parkinson�s, and schizophrenia. Research in neurobiology is essential for developing therapies for these conditions. Browse our peer-reviewed product directory to find the best neurobiology research tools, compare products, check reviews, and get pricing directly from manufacturers.

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Nova Metrion exceeds itself in secondary ion mass spectrometry