ResourceSpectroscopy
Multielement nanoparticle analysis of semiconductor process chemicals using spICP-QQQ
4 Aug 2022In this application note, Agilent presents a study where multiple element NPs were measured in semiconductor grade tetramethyl ammonium hydroxide (TMAH). The Agilent 8900 Triple Quadrupole ICP-MS (ICP-QQQ) was used for the analysis because of its high sensitivity, low background, and effective interference removal capability.
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8900 Triple Quadrupole ICP-MS
Agilent TechnologiesThe Agilent 8900 triple quadrupole ICP-MS (ICP-QQQ) is the world’s most successful and widely used tandem ICP mass spectrometer. Available in a range of configurations to cover applications from routine contract analysis to advanced research and high-purity materials analysis, the Agilent 8900 ICP-QQQ redefines ICP-MS performance, delivering results you can trust.