ResourceGeneral Lab

Characterization of advanced semiconductor materials and processes with nanoscale IR spectroscopy

27 Jun 2023

Submicron and nanoscale chemical identification of semiconductor materials, specifically those that are organic, is a significant challenge in the research of devices, as well as in process control and failure analysis environments. In this application note from Bruker, explore how because of these challenges there are a multitude of techniques used by semiconductor manufacturers to identify chemical components.

Dimension IconIR

Bruker Nano Surfaces and Metrology

Bruker’s large-sample Dimension IconIR system combines nanoscale infrared (IR) spectroscopy and scanning probe microscopy (SPM) on one platform to deliver the most advanced spectroscopy, imaging, and property mapping capabilities available for academic researchers and industrial users. Incorporating decades of research and technological innovation, IconIR provides unrivaled performance based on and building off the industry-best AFM measurement capabilities of the Dimension Icon. 

(0)

Anasys nanoIR3

Bruker Nano Surfaces and Metrology

The nanoIR3 is the latest generation nanoscale IR spectroscopy, chemical imaging, and property mapping system for both materials and life science applications. The system also provides IR-based chemical imaging to provide mapping of chemical variations of the feature of interest. Unique point spectroscopy capabilities provide both spectroscopy and chemical imaging with a single source.

(1)

Links

Tags

Characterization of advanced semiconductor materials and processes with nanoscale IR spectroscopy