MFM 310
Rigaku CorporationThe Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. Perform thickness, density, roughness & composition of films on blanket and patterned wafers. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.The MFM310 is designed with high-volum…