JBX-A9 Electron Beam Lithography System

JBX-A9 Series Features

• High Precision and High Throughput Direct Writing System
• Built with JEOL’s renowned Electron Optics for ultimate stability
• Loadable wafer up to 300 mm
• FOUP system optionally available
• In-line extendibility to other process tools such as coaters and developers
• Low power consumption
• Improved ease-of-use for all experience levels