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New High Density, Low Energy Sputtering Plasma Enables Depth Profiling and Fast Analysis

10 Sept 2015
Chelsie Phillips
Temporary Editorial Assistant

Product news

HORIBA Scientific, global leader in plasma profiling, has announced the release of their new Ultra Fast Depth Profiling TOFMS. This unique Plasma Profiling TOFMS (PP-TOFMS) instrument is compact and provides chemical composition as a function of depth of solid materials.

The depth profiling technique involves a high ion density ionic glow discharge plasma source that erodes and ionizes sample material, coupled to an ultra fast orthogonal Time of Flight Mass Spectrometer. Since the sample does not need to be transferred to a high vacuum chamber, pre-analysis time is greatly reduced

The use of a radio frequency excitation signal allows analysis of all types of materials ranging from conductive to non-conductive (e.g. thin films on thick glass substrates can be analyzed in just a few minutes) and from inorganic to hybrid.

Minimal sample preparation, coupled with our ‘no UHV sample transfer environment,’ also contributes to the high speed of analysis and makes PP-TOFMS a user friendly tool that is easily implemented in a variety of scientific and engineering applications.

PP-TOFMS analysis offers fast data about just-deposited, just-processed layers, or any solid sample being analyzed. It will provide valuable information about depth distribution of major elements, profiles of dopants, identification of unexpected contaminants, and quality of interfaces within the nanometer scale.

The new PP-TOFMS offers broad capabilities. Not only can it detect any element, but the technique is nearly equally sensitive to all elements, except Hydrogen, Carbon, Nitrogen, and Oxygen, since the ionization process is completely separated from the sputtering process. This permits a standard-free, instantaneous semi-quantification analysis of a sample with an atomic concentration range spanning orders of magnitudes in a single measurement.

“PP-TOFMS analysis provides valuable information about depth distribution of major elements, profiles of dopants, identification of unexpected contaminants, and quality of interfaces within the nanometer scale,” said Agnès Tempez, Product Manager, HORIBA Scientific. “It can save a lot of time in the optimization of layer deposition process and fabrication method for a wide range of materials applications, such as microelectronics, photovoltaics, and optoelectronics.”

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Mass SpectrometryMass spectrometry (MS) is a powerful analytical technique used to identify and quantify molecules based on the mass-to-charge ratio of gas-phase ions. It provides detailed information about the structure, composition, and properties of compounds and is widely used across fields such as environmental monitoring, materials science, drug discovery and development, food and beverage testing, and wider chemical research. Key MS techniques include tandem mass spectrometry (MS/MS), liquid chromatography–mass spectrometry (LS-MS) and inductively coupled plasma (ICP-MS). Choosing from these wide range of techniques and technologies can be a daunting task, so keep up to date with scientific applications, performance expectations, and customer reviews here all in one place. Visit our product directory to receive quotes direct from the manufacturer. ProfilometersProfilometers are instruments used to measure a surface's profile, in order to quantify etch depth, deposited film thickness, and surface roughness. They operate in either contact or non-contact modes and may use optical or stylus techniques to make the actual measurements.Elemental AnalysisElemental analysis involves determining the elemental composition of a sample, often used in environmental, pharmaceutical, and material sciences. Techniques like ICP-MS, X-ray fluorescence, and atomic absorption spectroscopy allow precise quantification of elements such as metals and nonmetals in complex matrices. Browse our peer-reviewed product directory to find the best elemental analysis tools, compare products, check reviews, and get pricing directly from manufacturers.NanomaterialsNanomaterials such as carbon nanotubes, fullerenes and nanoparticles are a group of materials that measure between 1-1000nm for a single unit. Analysis techniques include AFM, electron microscopy and super resolution microscopy.Polymeric MaterialsPolymeric materials are widely used in industries ranging from biomedical devices to packaging and electronics. Research into these materials focuses on their properties, including strength, flexibility, and degradation. Advances in polymer science have enabled the development of more sustainable and high-performance materials. Explore the best polymeric material products in our peer-reviewed product directory; compare products, check reviews, and get pricing directly from manufacturers.

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