ResourceSpectroscopy
Analysis of metallic impurities in specialty semiconductor gases using gas exchange device (GED)-ICP-MS
1 Nov 2022In this application note, the GED_LAB was integrated with the Agilent 8900 Triple Quadrupole ICP-MS (ICP-QQQ) for the analysis of HF and Cl2 gases. Using the Agilent Software Developer’s Kit for ICP-MS MassHunter, IAS developed software to fully control the GED-MSAG-ICP-MS workflow from the GED software.
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8900 Triple Quadrupole ICP-MS
Agilent TechnologiesThe Agilent 8900 triple quadrupole ICP-MS (ICP-QQQ) is the world’s most successful and widely used tandem ICP mass spectrometer. Available in a range of configurations to cover applications from routine contract analysis to advanced research and high-purity materials analysis, the Agilent 8900 ICP-QQQ redefines ICP-MS performance, delivering results you can trust.