The SU8000 Series is Hitachi's latest product family of ultra-high performance, semi-in-lens SEM with cold-field emission.
The series was developed in response to the growing demand for robust, affordable SEM application solutions. Image performance in this series is optimized with the latest generation of Hitachi's patented super ExB in-lens detection for energy filtering, charge suppression, and contrast control; affording ultra-low voltage imaging resolution of 1.3nm at 1.0kV. The user friendly GUI and 24"" wide viewing monitor offer convenient, intuitive operation. Hitachi's cold field emission technology with double condenser optics ensure the highest resolution and full control of probe current from 1pA to more than 5nA; ideal for observation of sensitive specimens and for elemental analysis (EDX) - where today's SDD detectors achieve on the order of 10000 to 100000 counts per second.
In response to the increasing need for fine surface detail imaging on nanoscale structures, enhanced image resolution at low beam energies has been achieved yielding a SE resolution of 1.3nm (electron landing energy of 1keV). SU8040's key feature is the new high-performance REGULUS specimen stage, which enables smooth navigation at magnifications of several hundred k with immediate response to trackball or joystick commands and drift-less stopping upon release.