Optical Characterization of ITO Films Prepared in Different Atmospheres Using Spectroscopic Ellipsometry

Indium tin oxide (ITO) is one of the most widely used transparent conducting oxides because of its two chief properties, its electrical conductivity and optical transparency, as well as the ease with which it can be deposited as a thin film. Thin films of ITO are used in organic light-emitting diodes, solar cells, antistatic coatings and EMI shieldings. The aim of this study was to see the effect of the heat treatment conditions in various atmospheres on optical properties of ITO films, by spectroscopic ellipsometry over the spectral range 190-2100nm.