Application Note: A case study of sparse-particle analysis in a bulk material
26 September 2023

This application note from ZEISS describes a case study of a correlative workflow that combines submicron-resolution 3D X-ray microscopy and focused ion beam scanning electron microscope (FIB-SEM) with an integrated femtosecond laser for streamlined, precise analysis and results available the same day. In the note, ZEISS details how two isolated particles buried within a small iron plate were characterized, and how the workflow can be applied to a variety of applications from life science to semiconductors.