ZEISS Crossbeam laser: Optimize and automate LaserFIB processing

14 April 2023

The video from ZEISS showcases its technology that enables the user to access buried structures. It achieves this through the use of a focused ion beam–scanning electron microscopy (FIB-SEM) with an integrated laser chamber that allows for automated processing, polishing, cleaning, and transfer of the sample to the FIB chamber. The system can prepare multiple samples, and pre-installed recipes for different materials to help the user work efficiently. Maintaining the cleanliness of the FIB-SEM main chamber and detectors is also emphasized.