14 April 2023
In this presentation, Dr. Fabián Pérez-Willard discusses the fabrication and characterization of nanofluidic lab-on-a-chip devices for the analysis of single DNA molecules using focused ion beam scanning electron microscopy (FIB-SEM). Nanochannels with different shapes and depths can be quickly prototyped through direct FIB nanopatterning on silicon master stamps. UV nanoimprinting transfers the pattern to a polymer-on-glass stamp, which is used to create the actual chip. In the FIB-SEM, the master stamps can be machined, and the entire fabrication process can be monitored in a non-destructive way.