Sensirion extends its SFC5500 mass flow controller series with new versions
The high-performance mass flow controllers and meters are calibrated for multiple gases and come with push-in fittings
22 Jun 2022
Sensirion has successfully launched its mass flow controllers for catalog distribution. For about a year already, mass flow controllers have been available to customers quickly and easily for evaluation and initial testing. The sensor manufacturer is now expanding its product range with two additional mass flow controllers from the successful SFC5500 series and four new mass flow meters in the SFM5500 series. The new mass flow controllers and meters are ideally suited for analytical, medical, and industrial applications.
The high-performance mass flow controllers and meters are calibrated for multiple gases and come with push-in fittings, which can be easily swapped out by the user from the list of compatible parts. Thanks to the ultra-wide range, each device can cover several of the flow ranges found in conventional devices. The versatile SFC5500 mass flow controller is now available in ranges from 50 sccm to 200 slm. In addition, a new mass flow meter series – the SFM5500 – is being launched; it is a valveless sibling of the SFC5500, featuring the same excellent performance. These pressure-resistant mass flow meters are now available in the following four flow ranges: 50 sccm, 0.5 slm, 2 slm, and 10 slm.
The SFC5500/SFM5500 series represent the culmination of Sensirion’s 20-year track record in precision control of the flow of gas. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allows Sensirion to build radical mass flow controllers and meters with best-in-class performance and excellent reliability, which do not drift and do not require in-service re-calibration – unlike most other devices on the market.
Thanks to the exceptionally high control range enabled by the CMOSens® MEMS flow sensor, the SFC5500/SFM5500 series can cover several of the flow ranges of a traditional mass flow controller/meter in a single device. Coupled with multi-gas calibration and exchangeable fittings, the SFC5500/SFM5500 mass flow controllers/meters are the first on the market to be available as standard, off-the-shelf products suitable for applications in medical, analytical, and industrial sectors. Thanks to this versatility, they are also the first mass flow controllers available via catalog distribution.
The SFC5500/SFM5500 series is suited to a broad range of applications where the highest accuracy and speed and the widest dynamic range are needed: gas mixing in medical and analytical instruments, flow control in bioreactor and semiconductor applications, and process control in industrial automation, research and development and prototyping.
Visit Sensirion from June 21 to 24 at the Analytica 2022 trade show in Munich, Germany (Hall A3, Booth 137) to find out more about the new product variants.
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Mass Flow Meter SFM5400
SensirionThe SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 100 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications. The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter. The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website. Features High accuracy at low flow rates (< 1 sccm) Excellent accuracy / repeatability (0.8% / 0.1% of measured value respectively) Wide dynamic range (turndown ratio 1000:1) Multiple gases and gas recognition Digital and analog interfaces Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc. Highly configurable MTBF 169 years - no recalibration required