Application Note: Flat-panel display photoresist stripping process optimization using a multi-channel online FT-NIR wet process analyzer
8 October 2021
During the photoresist (PR) stripping step of the flat panel display production process, all components must be precisely monitored to reduce the probability of panel damage and increase process yield. Download this white paper to learn the importance of process control using precise and efficient analysis tools. You will find an outline of pre-existing technologies that brings into focus the use of real-time, high-precision analysis of this process. It also demonstrates the relevance and advantages of ABB’s Wet Process Analyzer (WPA) as a real-time multi-stream analytical method for FPD PR stripping process optimization.