High-resolution EDS analysis enabled by ZEISS GeminiSEM

14 April 2023

In this video from ZEISS, the benefits of variable pressure (VP) mode and NanoVP mode are discussed. The beam sleeve in the VP mode enables the electron beam to travel only a short distance in the low vacuum region, reducing the skirting effect. The NanoVP mode on ZEISS field emission scanning electron microscopes (FE-SEMs) improves image quality in variable pressure mode, enhancing resolution and signal collection.