Applications of LaserFIB and ToF-SIMS

14 April 2023

In this webinar, Dr. Fabián Pérez-Willard and Dr. Antonio Casares from ZEISS discuss the LaserFIB, which is a combination of a ZEISS FIB-SEM and laser. The laser ablates material rapidly to access buried structures, which can then be analyzed by focused ion beam scanning electron microscopy (FIB-SEM). Minimal damage or heat effects occur from the laser. This technology is attracting attention in materials engineering for creating micromechanical testing devices and large cross-sections for EBSD. ZEISS also offers secondary-ion mass spectrometry (SIMS) technology for compositional and isotopic analysis and the webinar will provide an overview of this technology and its potential applications.