X'Pert PRO MRD

X'Pert PRO MRD
 4.3/5.0 (1 review)

PANalytical Inc.

PANalytical's X'Pert PRO Materials Research Diffractometer is the most flexible system available for X-ray diffraction studies for: • Advanced materials science and nanotechnology • Metrologic cha...read more

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Reviews

Yifan Zheng


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Member since 2010

Organization:
Zhejiang University of Technology
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RATING: 4.3

  • 5 out of 5EASE OF USE
  • 5 out of 5AFTER SALES SERVICE
  • 3 out of 5VALUE FOR MONEY




Review date: 16 May 2012

X'Pert PRO MRD

"instrument gives excellent accuracy and is of good quality.Good intensity and rapid performance. It is easy to operate."

Description

 

PANalytical's X'Pert PRO Materials Research Diffractometer is the most flexible system available for X-ray diffraction studies for:
• Advanced materials science and nanotechnology
• Metrologic characterization in semiconductor process development

It can handle a wide range of applications, and is especially suitable for thin film analysis applications such as:
• Rocking curve analysis and reciprocal space mapping
• Reflectometry and thin film phase analysis
• Residual stress and texture analysis

As well as the proven standard version of the Panalytical XPert PRO MRD system, a number of special versions exist:
• With the XPert PRO MRD system for in-plane diffraction, it becomes possible to measure diffraction from lattice planes that are perpendicular to the sample surface
• The X'Pert PRO Extended MRD allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing the intensity of the incident beam
• The X'Pert PRO MRD XL meets all the high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries
• By facilitating analysis of wafers up to 300 mm in diameter, with a sophisticated, automatic wafer loader option, the X'Pert PRO MRD XL becomes an advanced tool for thin film process development

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