Precision Analysis of BPSG Films
13 Oct 2014

In this application note, the reproducibility and long-term stability is shown of the PANalytical 2830 ZT Wafer Analyzer in determining the boron and phosphorus concentration and film thickness of BPSG films. For the determination of the boron concentration, the gauge capability will be shown as a function of process tolerance.

Show    per page
1 of 1     Page  1 Next 
Cu-Base-FP – Analysis of Copper Alloys elemental analysis7 Oct 2014Read
Pt, Pd, Rh in Recycled Automotive Catalysts software, catalyst, Pt26 Aug 2014Read
Quantitative Analysis of Waste Oil by EDX-7000 oil analysis5 Mar 2014Read
Quantitative Analysis of Cement by EDX-8000 cement5 Mar 2014Read
Analysis of Sulfur, Vanadium and Nickel in Crude Oil EDXRF, crude oil analysis, sulfur30 Jul 2013Read
Gas Cluster Ion Sources Open up New Possibilities for Chemical Analysis of Materials with X-ray Photoelectron Spectroscopy (XPS)30 Jul 2013Read
Analysis of Clinker and Cement with Thermo Scientific ARL OPTIM’X WDXRF Sequential Spectrometer WDXRF, cement29 Jul 2013Read

Popular tags in SelectScience