High Precision R&D Spectroscopic Ellipsometer The UVISEL ellipsometer range offers the best combination of modularity and performance for advanced thin film, surface and interface characterization. Based on phase modulation technology, the UVISEL ellipsometer provides a powerful optical design to continuously cover the spectral range from 142 to 2100 nm. High quality data are delivered across the whole spectral range in terms of high accuracy, high resolution measurements and excellent signal to noise ratio. The UVISEL spectroscopic ellipsometer incorporates phase modulation technology to characterize polarization changes at high frequency (50 kHz), and without any mechanical movement. It results in: High accuracy measurements for all values of (Ψ,Δ) Excellent signal/noise ratio from the ...Read more
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