UVISEL 2 VUV by HORIBA Scientific

Manufacturer HORIBA Scientific

UVISEL 2 VUV by HORIBA Scientific product image
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A versatile spectroscopic ellipsometer covering a range from VUV to NIR.

The UVISEL 2 VUV is a new generation of phase modulation ellipsometer for VUV measurements. It is the only spectroscopic ellipsometer on the market designed to deliver the fastest thin film measurements over the largest wavelength range, from 147 to 2100 nm.

The UVISEL 2 VUV is “a hybrid ellipsometer”, capable of operating in 2 modes: under nitrogen or primary vacuum. Its mechanical design is optimized for low nitrogen consumption down to 6L/min, and allows for fast sample loading, which takes less than two minutes. The choice of eight spot sizes is ideal for small area measurements, and the readily accessible chamber in front makes sample loading very convenient.

The UVISEL 2 VUV provides high sensitivity at VUV wavelengths. It integrates dual high power energy sources, high throughput optics, a CaF2 photo-elastic modulator and two modern monochromators. Sample measurement takes less than 8 minutes from 147 to 850 nm with an excellent signal to noise ratio.

UVISEL 2 VUV Features:

  • Fast sample loading
  • Fast purging
  • Lowest nitrogen consumption
  • Very fast measurement
  • Two modes of operation: under nitrogen or primary vacuum