Now the calibration grating set TGS1 which consists of three gratings TGZ1, TGZ2, TGZ3 is available with PTB tracable certificate. Ordering grating set TGS1 with code TGS1_PTB you will get the gratings with PTB traceable certificate. The gratings TGS1_PTB are measured on the SPM which has been preliminary calibrated using the PTB certified grating set TGS1.
K-TEK Nano Calibration Grating Set TGS1 description:
• Si wafer
• the grating is formed on the layer of SiO2
Pattern types: 1- Dimensional (in Z-axis direction)
• TGZ1 - 18.5±1 nm*
• TGZ2 - 108.5±2 nm*
• TGZ3 - 535±2.5 nm *
Chip size: 5x5x0,5mm
Effective area: central diameter 3x3mm
* the average meaning based on the measurements in 5 points of each grating on the SPM calibrated by PTB certified grating set TGS1.