mr - I T85

  |  1 reviews

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micro resist technology GmbH

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The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components.

Unique Features
  • Unpolar thermoplastic
  • Excellent film quality
  • Beneficial flow behaviour during imprinting, low imprint pressure
  • Excellent UV and optical transparency
  • High plasma etch resistance
    - comparable to novolak-based photoresists
    - selectivity to silicon 9:1 (Si / mr-I T85)
  • High chemical stability
    - high resistance to acids, bases and polar solvents
    - no interactions with conventional photoresists

Product Overview

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mr - I T85

Manufacturer micro resist technology GmbH

3.7 / 5.0 | 1 reviews