mr - I T85

 3.6/5.0 (1 review)

micro resist technology GmbH

The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components. Unique Features Unpolar thermoplastic ...read more

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micro resist technology GmbH

Reviews

Omar Gustafsson


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Member since 2007

Organization:
Technical University of Denmark
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RATING: 3.6

  • 4 out of 5EASE OF USE
  • 3 out of 5AFTER SALES SERVICE
  • 4 out of 5VALUE FOR MONEY




Review date: 07 Jun 2007

mr - I T85

Description

 

The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components.

Unique Features

  • Unpolar thermoplastic
  • Excellent film quality
  • Beneficial flow behaviour during imprinting, low imprint pressure
  • Excellent UV and optical transparency
  • High plasma etch resistance
    - comparable to novolak-based photoresists
    - selectivity to silicon 9:1 (Si / mr-I T85)
  • High chemical stability
    - high resistance to acids, bases and polar solvents
    - no interactions with conventional photoresists

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