Manufacturer ZEISS Microscopy

ZEISS AURIGA by ZEISS Microscopy product image

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AURIGA, the CrossBeam System combines the 3D imaging and analysis performance of the GEMINI e-Beam column with the ability of a FIB for material processing and sample preparation on a nanoscopic scale. Available as AURIGA 40 and AURIGA 60 with different chamber designs you profit from maximum flexibility in industrial quality control and material science.

Your Crossbeam Workstation
Accommodate an optimum number of accessories / detectors only depending on the size of the vacuum chamber.

Unique Imaging
•Imaging of non-conductive specimens using all standard detectors with local charge compensation
•Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB-technology
•Investigation of magnetic samples with GEMINI objective lens design

Advanced Analytics
•Analysis of non-conducting materials with local charge compensation
•Multi-purpose chamber with whether 15 or 23 accessory ports
•Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc.

Precise Processing
•Innovative FIB technology with best-in-class resolution (< 2.5 nm)
•High resolution live FE-SEM monitoring of the entire preparation process
•Advanced gas processing technology for ion and e-beam assisted etching and deposition

Future Assured
•Available as AURIGA 40 and AURIGA 60 with modified chamber design
•Expandable platform concept based on GEMINI FE-SEM technology
•Modular building blocks for value-adding functionality

Product Overview