ZEISS Focused Ion Beam Column - Enabling Precision and long-term Stability for Cutting Edge Crossbeam Applications
22 March 2017

A Focused Ion Beam (FIB) combined with a Field Emission Scanning Electron Microscope (FE-SEM) has become a powerful instrument for numerous applications in research and industry. Ion beam milling has become the standard for cross-sectioning and cutting slices for tomographic imaging, but can also be used to create new materials or functional structures with superior properties. In this paper, typical FIB-SEM applications and their demands in terms of FIB capability are introduced.