Industry News: Rigaku Features Latest Semiconductor Metrology Solutions at SEMICON West

Rigaku presents its X-ray analytical instrumentation for the semiconductor industry at SEMICON West 2019

10 Jul 2019


Rigaku Corporation have announced its attendance at SEMICON West 2019. SEMICON West is the premier event for the microelectronics industry, highlighting the latest innovations, products, processes, and services for the design and manufacture of the most sophisticated electronics of today. The three-day event, organized by Semiconductor Equipment & Materials Institute connects the entire extended electronics supply chain and takes place Tuesday, July 9 through Thursday, July 11, 2019 at the Moscone Center in San Francisco, California.  

Rigaku, a leading supplier of X-ray metrology tools, is showcasing their semiconductor metrology products at booth 746. 

Rigaku is a pioneer in designing and manufacturing X-ray based measurement tools to solve semiconductor manufacturing challenges. With over 35 years of global market leadership in the semiconductor industry, Rigaku solutions employ X-ray fluorescence (XRF), diffraction (XRD), and reflectometry (XRR) techniques and enable everything from in-fab process control metrology to R&D for thin film and materials characterization, as well as total-reflection XRF spectrometers (TXRF) with integrated vapor phase decomposition (VPD) for trace contamination monitoring. The Rigaku vacuum products division offers a full line of rotary magnetic fluid feedthroughs. 

The Rigaku Semiconductor Division designs and manufactures in-line, high-throughput X-ray monitoring systems for inspection and measurement to meet semiconductor manufacturing challenges, determining critical process parameters such as thin film thickness, composition, roughness, density, porosity, and crystal structure.

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