Grating set K-TEK Nano TGSFull consists of 8 calibration gratings: TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, TGQ1, TDG1
Fields of application for the TGSFull Calibration Grating Set:
- SPM simultaneous calibration of X, Y, and Z directions
- Submicron SPM calibration in X or Y direction
- Lateral and vertical calibration
- Detection of lateral non-linearity
- Detection of hysteresis, creep, and cross-coupling effects
- Detection of angular distortion
- 3-D visualization of the scanning tip
- Determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.