Grating set K-TEK Nano TGSFull consists of 8 calibration gratings: TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, TGQ1, TDG1
Fields of application for the TGSFull Calibration Grating Set:
- SPM simultaneous calibration of X, Y, and Z directions - Submicron SPM calibration in X or Y direction - Lateral and vertical calibration - Detection of lateral non-linearity - Detection of hysteresis, creep, and cross-coupling effects - Detection of angular distortion - 3-D visualization of the scanning tip - Determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
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