Grating set TGS2 consists of 6 calibration gratings: TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1
Fields of application for the TGS2 Calibration Grating Set:
- Lateral and vertical calibration
- Detection of lateral non-linearity
- Detection of hysteresis, creep, and cross-coupling effects
- Detection of angular distortion
- 3-D visualization of the scanning tip
- Determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.