SH-110 Dry Scroll Pump
Ultimate pressure in a compact package
The Agilent Technologies SH-110 is a dry, hermetic scroll pump with industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump has a pumping speed of 110 liters/minute (on 60 Hz power) and an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is ideal for many end-user applications.
The SH-110 pump conforms to European Union directives (CE), Canadian Standards Authority (CSA), and Semi S2-0200 requirements.