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Your 3-in-1 Multibeam Ion Microscope for Sub-10nm Nanostructuring

With ORION NanoFab you profit from the only system in the world that covers the complete range of micromachining to nanomachining applications using gallium, neon and helium ion beams integrated in a single instrument.

Fabricate sub-10nm nanostructures with speed and precision. Seamlessly switch between gallium, neon and helium beams with ORION NanoFab:

• Use the neon beam to machine nanostructures at great speed and achieve high throughput
• Use the helium beam to create delicate sub-10 nm structures
• Use optional gallium FIB to remove massive material

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