mr - I T85 by micro resist technology GmbH
The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components. Unique Features
Unpolar thermoplastic
Excellent film quality
Beneficial flow behaviour during imprinting, low imprint pressure
Excellent UV and optical transparency
High plasma etch resistance - comparable to novolak-based photoresists - selectivity to silicon 9:1 (Si / mr-I T85)
High chemical stability - high resistance to acids, ba...
Read more The supplier does not provide quotations for this product through SelectScience. Browse these related products instead