mr - I T85 by micro resist technology GmbH
Manufacturer micro resist technology GmbH
The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components. Unique Features
Unpolar thermoplastic
Excellent film quality
Beneficial flow behaviour during imprinting, low imprint pressure
Excellent UV and optical transparency
High plasma etch resistance - comparable to novolak-based photoresists - selectivity to silicon 9:1 (Si / mr-I T85)
High chemical stability - high resistance to acids, ba... Read more
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mr - I T85
Average Rating: 3.7
1 Scientist has reviewed this product
Status:
Reviewer
Member since: 2007
Organization: Technical University of Denmark
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- Ease of use
- After sales service
- Value for money
Rating: 3.7
Review date: 07 Jun 2007 | mr - I T85
The new mr-I T85 series has been developed preferably for permanent applications in lab-on-a-chip systems, microfluidics, and microoptical components.
Unique Features
Excellent film quality
Beneficial flow behaviour during imprinting, low imprint pressure
Excellent UV and optical transparency
High plasma etch resistance
- comparable to novolak-based photoresists
- selectivity to silicon 9:1 (Si / mr-I T85)
High chemical stability
- high resistance to acids, bases and polar solvents
- no interactions with conventional photoresists
Unique Features
- comparable to novolak-based photoresists
- selectivity to silicon 9:1 (Si / mr-I T85)
- high resistance to acids, bases and polar solvents
- no interactions with conventional photoresists
Product Overview
