MICROLAB 350 is a high-performance, scanning Auger Electron Spectrometer (AES) with High Sensitivity and High Energy Resolution. SEM resolution <7 nm and Scanning Auger Mapping (SAM) resolution <12 nm.
High-performance scanning Auger electron spectrometer (AES)
Secondary Electron Mapping (SEM) at <7 nm Resolution
Scanning Auger Mapping (SAM) at <12 nm Resolution
Spherical Sector Analyser Allows High Energy Resolution for:
Chemical state determination
Reflected Electron Energy Loss Spectroscopy (REELS)
Measurement of dopants in silicon
Multitechnique Capability Including:
X-ray photoelectron spectroscopy (XPS)
Energy dispersive X-ray spectroscopy (EDX)
Backscattered electron detection
Preparation Facilities Including:
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