JIB-4601F Multibeam System by JEOL USA
All in one tool - Various applications are offered with one instrument: • Optimum-geometry specimen chamber for all functions of FIB milling, SEM imaging, and EDS/EBSD analyses • High-accuracy thin-film preparation achieved by combination with high-resolution SEM • Fast wide-area milling with large FIB ion-beam current up to 60 nA • Installation of up to 3 gas guns for protective-film creation and wiring modification • Real-time monitoring of the progress of FIB milling observed by high-resoluti...
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