Large-scale material removal and far-reaching analysis: fast, flexible, and integrated.
AURIGA Laser combines an electron microscope with extremely fast material removal and precise fine removal. Remove your sample material in the shortest time with the pulsed laser beam. Rework interesting sample positions precisely with the focussed ion beam. Also, profit from the imaging qualities of the FIB-SEM - in the same system.
On the same device, you create images in high resolution in the nanometre range. You investigate your samples with X-ray analysis. In the shortest time, you also process non-conducting material and complex geometries.
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