Enter the 3D Nano-World with CrossBeam Technology
AURIGA Compact is your FIB-SEM to enter the world of 3D nanotomography. Profit from the proven Carl Zeiss CrossBeam technology. Combine high resolution imaging with the milling performance of the focused ion beam. You gain maximum material and topographical contrast of all kinds of samples: high resolution of up to 2.5 nm even at low acceleration voltage of 1 kV, the combined in-lens SE and BSE detector and the local charge compensation open applications in the fields of nanotomography, 3D-Analytics, sample preparation and nanopatterning.
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