Large area imaging for SEM, FE-SEM & FIB-SEM

ATLAS 3D is a package of hard- and software specifically designed for FIB nanotomography. You automatically create a 3D data stack at a resolution up to 32 k x 32 k pixels. Analyze thousands to millions of cubic micrometers of volume with nanometer scale resolution in all three dimensions.

Intelligent software algorithms reduce the amount of data and the time needed for acquisition. Profit from drift correction, autostigmation, autofocus and adaptive and dynamic 3D tracking support for fast and reliable results.